This thesis presents actuators used in autonomous microsystems. Characteristic for all actuators presented is the low drive voltage and the low power consumption. Different motion mechanisms have been studied and applied in various locomotion modules for microrobots… Contents 1 Introduction 1.1 Background 2 Autonomous microrobots 2.1 Introduction to microrobots 2.2 The MiCRoN robots 2.2.1 Contributions [...]